Title
Characterization of Germanium Implanted Si1-xGex Layer
Document Type
Article
Publication Date
1-1993
Publisher
Springer-Verlag
Recommended Citation
A. Gupta, C. Cook, L. Toyoshiba, J. Qiao, and C.Y. Yang, K. Shoji, A. Fukami, T. Nagano, and T. Tokuyama, “Characterization of Germanium Implanted Si1-xGex Layer,” Journal of Electronic Materials 22, 125-128 (1993).
