Interface Characteristics of Vertically Aligned Carbon Nanofibers for Interconnect Applications

Authors

Yusuke Ominami
Quoc Ngo
Makoto Suzuki
Alexander J. Austin
Cary Y. Yang, Santa Clara UniversityFollow
Alan M. Cassell
Jun Li

Document Type

Article

Publication Date

12-25-2006

Publisher

American Institute of Physics Publishing

Abstract

The authors characterize the detailed interface structure of Ni-catalyzed vertically aligned carbon nanofibers (CNFs) prepared by plasma-enhanced chemical vapor deposition for interconnect applications. Stacked graphitic layers and cup-shape structures of CNFs around the interface region have been observed using high-resolution scanning transmission electron microscopy. The interaction between the Ni catalyst and Ti layer dramatically affects the CNF structure during initial growth. The effect of interface nanostructures on contact resistance is also discussed.

Comments

Copyright © 2006 American Institute of Physics Publishing. Reprinted with permission.

Recommended Citation

Y. Ominami, Q. Ngo, M. Suzuki, A.J. Austin, C.Y. Yang, A.M. Cassell, and J. Li, “Interface Characteristics of vertically Aligned Carbon Nanofibers for Interconnect Applications,” Applied Physics Letters 89, 263114 (3 pp) (2006). https://doi.org/10.1063/1.2423241