Document Type
Article
Publication Date
12-20-2010
Publisher
American Institute of Physics Publishing
Abstract
A method to extract the contact resistance and bulk resistivity of vertically grown carbon nanofibers (CNFs) or similar one-dimensional nanostructures is described. Using a silicon-compatible process to fabricate a terrace test structure needed for the CNF length variation, the contact resistance is extracted by measuring in situ the resistances of individual CNFs with different lengths and within a small range of diameters using a nanoprober inside a scanning electron microscope. Accurate determination of contact resistances for various combinations of catalysts and underlayer metals can lead to eventual optimization of materials’ growth and device fabrication processes for CNF via interconnects.
Recommended Citation
K. Li, R. Wu, P. Wilhite, V. Khera, S. Krishnan, X. Sun, and C.Y. Yang, “Extraction of contact resistance in carbon nanofiber via interconnects with varying lengths,” Applied Physics Letters 97, 253109 (3 pp) (2010). https://doi.org/10.1063/1.3527927
Comments
Copyright © 2010 American Institute of Physics Publishing. Reprinted with permission.