Visible-light photoresponse of AlN-based film bulk acoustic wave resonator

Authors

Changjian Zhou
Yi Yang
Y. Shu
Hualin Cai
Tian-Ling Ren
Mansun Chan
J. Zhou
Hao Jin
Shurong Dong
Cary Y. Yang, Santa Clara UniversityFollow

Document Type

Article

Publication Date

5-17-2013

Publisher

American Institute of Physics Publishing

Abstract

Visible-light photoresponse of an AlN-based film bulk acoustic wave resonator (FBAR) is demonstrated. It is found that the FBAR exhibits a resonant frequency downshift under purple light illumination and the magnitude of the frequency downshift increases as the power density increases within the range of 5–40 mW/cm². A resonant frequency downshift of 1313 KHz is observed under 40 mW/cm² illumination, corresponding to a minimum detection power of 6.09 nW. A sub-bandgap photoresponse of the AlN thin film is proposed to explain this phenomenon.

Comments

Copyright © 2013 American Institute of Physics Publishing. Reprinted with permission.

Recommended Citation

C.J. Zhou, Y. Yang, Y. Shu, H.L. Cai, T.L. Ren, M. Chan, J. Zhou, H. Jin, S.R. Dong, and C.Y. Yang, “Visible-light photoresponse of AlN-based film bulk acoustic wave resonator,” Applied Physics Letters 102, 191914 (3 pp) (2013). https://doi.org/10.1063/1.4807135