Date of Award


Document Type



Santa Clara : Santa Clara University, 2017.

Degree Name

Doctor of Philosophy (PhD)


Mechanical Engineering

First Advisor

Drazen Fabris


Diffraction based mathematical model is developed to address the issue of spatial resolution in thermoreflectance imaging at the scale of 1 and 10 μm. Thermoreflectance imaging provided non-contact temperature measurement at micro and nano scale but the spatial resolution is limited by diffraction. By virtue of this work mathematical model is developed for the analysis of thermoreflectance data. In the development of model both the diffraction occurring at sample and substrate is combined to calculate intensity of thermoreflectance signal. This model takes into account the effective optical distance, sample width, wavelength, signal phase shift and reflectance intensity. Model shows qualitative and quantitative agreement with experimental data for the two wavelengths under investigation, 470 nm and 535 nm.