American Institute of Physics Publishing
The authors present scanning transmission electron microscopy (STEM) of carbon nanofibers (CNFs) on a bulk substrate using conventional scanning electron microscopy (SEM) without specimen thinning. By utilizing the electron beam tilted >85° from the substrate normal, bright-field STEM contrast is obtained for the CNFs on substrate with conventional SEM. Analysis of the observed contrast using Monte Carlo simulation shows that the weakly scattered electrons transmitted from the CNF are selectively enhanced by the largely tilted substrate and result in the observed STEM contrast. This mechanism provides a useful STEM imaging technique to investigate the internal structure of materials on bulk substrates without destructive specimen thinning.
M. Suzuki, Q. Ngo, H. Kitsuki, K. Gleason, Y. Ominami, and C.Y. Yang, "Bright-field transmission imaging of carbon nanofibers on bulk substrate using conventional scanning electron microscopy," Journal of Vacuum Science & Technology B25, 1615-1621 (2007). https://doi.org/10.1116/1.2775457