Title
PMOS contact resistance solution compatible to CMOS integration for 7 nm node and beyond
Document Type
Conference Proceeding
Publication Date
5-30-2016
Publisher
IEEE
Abstract
We report a PMOS contact resistivity (pc) improvement strategy by forming Ge-rich contact interface which is compatible to Ti/Si(Ge) system and CMOS integration flow. Short pulsed (nsec) laser anneal and advanced treatment during pre-clean have shown to be effective to segregate Ge towards SiGe surface resulting in PMOS ρc improvement. With Ge% increasing from 45 to 100%, pc improved three-fold, from 1.2e-8 to 2.8e-9 Ωcm2 , due to bandgap modulation and preferred Fermi-level pinning [1]. In the end, we propose a CMOS-integration-compatible contact flow which addresses ρc optimization for both PMOS and NMOS contact
Recommended Citation
Ni, C.-N., Huang, Y.-C., Jun, S., Sun, S., Vyas, A., Khaja, F., Rao, K. V., Sharma, S., Breil, N., Jin, M., Lazik, C., Mayur, A., Gelatos, J., Chung, H., Hung, R., Chudzik, M., Yoshida, N., & Kim, N. (2016). PMOS contact resistance solution compatible to CMOS integration for 7 nm node and beyond. 2016 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA), 1–2. https://doi.org/10.1109/VLSI-TSA.2016.7480531
Comments
International Symposium on VLSI Technology, Systems and Application (VLSI-TSA)
25-27 April 2016
Hsinchu, Taiwan